AbstractA switched capacitor (SC) power supply with a low output power can be made highly efficient, small and lightweight. The finite element method is a numerical technique superior in adaptability and convergence; however, its application to electronic circuits is yet to be explored. In this paper, the finite element method is used as a time domain algorithm for transient and steady‐state analysis of a step‐down, low‐output SC power supply. In the case where the on‐resistances of P‐channel MOS switches and N‐channel MOS switches are not equal, such transient characteristics as the overshoot and rise time of the output voltage and such steady‐state characteristics as the steady output voltage, efficiency and ripple voltages are analyzed. It is found that the parasitic inductance of the wiring reduces the power supply efficiency. Although the results agree well with those by the Hamming method, the computation time is shorter in the finite element method. It is confirmed that the finite element method is efficient for analysis of the problem described by st