Fabrication of patterned Gex/Si1−x/Si layers by pulsed laser induced epitaxy
作者:
Y. Chang,
S. Y. Chou,
J. Kramer,
T. W. Sigmon,
A. F. Marshall,
K. H. Weiner,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 19
页码: 2150-2152
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.104989
出版商: AIP
数据来源: AIP
摘要:
Selective growth of GexSi1−xon Si is demonstrated for the first time using a pulsed laser induced epitaxy technique, combined with either standard oxide or liftoff patterning processes. Two different dimensions of Ge0.12Si0.88/Si lateral wells are formed, 3.5 &mgr;m wide by 1700 A˚ deep, and 6 &mgr;m wide by 1300 A˚ deep. High‐resolution transmission electron microscopy, combined with energy‐dispersive x‐ray imaging, reveals a well‐defined two‐dimensional (2D) Ge redistribution profile with no significant line or surface defects observed. The 2D Ge well distribution profiles, governed by heat and mass transport during the laser processing, are discussed.
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