Multi-mode noise analysis of cantilevers for scanning probe microscopy
作者:
M. V. Salapaka,
H. S. Bergh,
J. Lai,
A. Majumdar,
E. McFarland,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 81,
issue 6
页码: 2480-2487
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.363955
出版商: AIP
数据来源: AIP
摘要:
A multi-mode analysis of micro-cantilever dynamics is presented. We derive the power spectral density of the cantilever displacement due to a thermal noise source and predict the cantilevers’s fundamental resonant frequency and higher harmonics. The first mode in the multi-mode model is equivalent to the traditional single-mode model. Experimental results obtained with a silicon nitride cantilever at 300 K are in excellent qualitative agreement with the multi-mode model. The multi-mode model may be used to obtain accurate values of the cantilever properties such as the elastic modulus, effective mass, thickness and moment of inertia. ©1997 American Institute of Physics.
点击下载:
PDF
(148KB)
返 回