A new formation process of anodizable structures ofn,n+, andn−silicon for the production of silicon‐on‐insulator structures
作者:
Xiang‐Zheng Tu,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1988)
卷期:
Volume 6,
issue 5
页码: 1530-1532
ISSN:0734-211X
年代: 1988
DOI:10.1116/1.584208
出版商: American Vacuum Society
关键词: SILICON;DONORS;ANODIZATION;SURFACE STRUCTURE;SILICA;INTERFACE STRUCTURE;ISLAND STRUCTURE;Si;INTERFACE FORMATION
数据来源: AIP
摘要:
A new formation process of anodizable structures ofn,n+, andn−silicon for the production of silicon‐on‐insulator (SOI) structures is described. In this process, proton implantation is employed to produce a high donor concentration layer near the surface ofn‐type silicon substrates, and nitrogen ion implantation is employed to define highly resistive islands in the high donor concentration layer. The anodization of silicon in HF solution to form porous silicon and the consequent oxidization of the porous silicon to form silicon dioxide is restricted to the high donor concentration regions. It is demonstrated that silicon islands with a width of 50 μm and a thickness of 0.55 μm are successfully isolated by an oxidized‐porous‐silicon layer with a thickness of 2.25 μm.
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