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Intrinsic and deep‐level photoacoustic spectroscopy of GaAs (Cr) and of other bulk semiconductors

 

作者: L. Eaves,   H. Vargas,   P. J. Williams,  

 

期刊: Applied Physics Letters  (AIP Available online 1981)
卷期: Volume 38, issue 10  

页码: 768-770

 

ISSN:0003-6951

 

年代: 1981

 

DOI:10.1063/1.92156

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Previous work on photoacoustic spectroscopy (PAS) of semiconductors has been restricted to material in powder form. This letter shows that PAS can also be used to study intrinsic and extrinsic (impurity) absorption of semiconductors in bulk, single‐crystal form. For GaAs (Cr) the technique can easily detect Cr impurities at 5×1016cm−3level. The effects of surface preparation on the spectra are discussed.

 

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