Intrinsic and deep‐level photoacoustic spectroscopy of GaAs (Cr) and of other bulk semiconductors
作者:
L. Eaves,
H. Vargas,
P. J. Williams,
期刊:
Applied Physics Letters
(AIP Available online 1981)
卷期:
Volume 38,
issue 10
页码: 768-770
ISSN:0003-6951
年代: 1981
DOI:10.1063/1.92156
出版商: AIP
数据来源: AIP
摘要:
Previous work on photoacoustic spectroscopy (PAS) of semiconductors has been restricted to material in powder form. This letter shows that PAS can also be used to study intrinsic and extrinsic (impurity) absorption of semiconductors in bulk, single‐crystal form. For GaAs (Cr) the technique can easily detect Cr impurities at 5×1016cm−3level. The effects of surface preparation on the spectra are discussed.
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