We report field‐effect measurements of the density‐of‐states (DOS) distribution in the last‐deposited surface of undoped glow‐dischargea‐(Si,Ge):H alloy films containing up to 15% Ge. Over the energy range investigated (Ef≤E≤Ef+0.4 eV) the DOS exhibits a peak approximately 0.7 eV belowEc, and the total number of midgap states increases monotonically by a factor of 2 with Ge content. No structure specifically attributable to Ge defect states is seen. These results are interpreted in terms of a diphasic microstructural model of the alloy films.