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Ferroelectric materials and IR bolometer arrays: From hybrid arrays towards integration

 

作者: Rex Watton,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 1994)
卷期: Volume 4, issue 2  

页码: 175-186

 

ISSN:1058-4587

 

年代: 1994

 

DOI:10.1080/10584589408018672

 

出版商: Taylor & Francis Group

 

关键词: ferroelectric thin fims;sputtering and sol-gel;pyroelectric merit;IR bolometer arrays

 

数据来源: Taylor

 

摘要:

Large arrays of bolometer elements offer uncooled and simple operation, and a thermal imaging performance which challenges the cooled semiconductor (photon) detectors. A hybrid array technology, exploiting the pyroelectric property of ferroelectric ceramic materials in the bolometer elements, is the basis of a successful range of linear and 2-D arrays. However, other technologies will compete for cost effectiveness in large area devices. Direct integration of ferroelectric thin films onto suitable thermal microstructures on the silicon readout IC is attractive if deposition processes which are compatible with the silicon IC are established. Deposited lead based perovskite films show considerable potential. Thin film resistance bolometers will also compete, and have some advantages of compatibility in fabrication.

 

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