Characterization results are given for a set of TiNxfilms grown on sapphire substrates at temperatures between 140 and 850 °C. A relationship between resistivity and spectral reflectivity is established, with highest reflectivities and lowest resistivities observed for the highest substrate temperatures. It is found that grain orientation within the films is random except at the highest deposition temperature where a preferred 100 orientation is indicated. Measurement of the superconducting transition temperature, lattice parameter, and microcrystalline texture of each film has been made and correlated with the stoichiometry, electrical, and optical properties.