Study of Contamination Rates in an Electron Microscope
作者:
R. L. Patterson,
C. M. Wayman,
期刊:
Review of Scientific Instruments
(AIP Available online 1963)
卷期:
Volume 34,
issue 11
页码: 1213-1215
ISSN:0034-6748
年代: 1963
DOI:10.1063/1.1718179
出版商: AIP
数据来源: AIP
摘要:
A study of contamination rates in a Hitachi HU‐11 electron microscope under various conditions was made. A decontamination device is described which lowers the contamination rate by more than a factor of two. The construction of this apparatus is such that accessories like a multiaxis tilting stage and specimen tensile straining device can be used concurrently.
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