YBaCuO superconducting thin films are prepared by using a plasma‐enhanced metalorganic chemical vapor deposition. An rf discharge plasma is used to decompose the metalorganic chelate precursors. Optimization of the film deposition conditions is studied using optical emission spectroscopy. The rf process is also applied to decompose silicon compounds for preparation a SiO2insulating film on the YBa2Cu3O7bulk superconductor.