Common path scanning heterodyne optical profilometer for absolute phase measurement
作者:
M. J. Offside,
M. G. Somekh,
C. W. See,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 55,
issue 20
页码: 2051-2053
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.102102
出版商: AIP
数据来源: AIP
摘要:
A scanning optical profilometer is described which overcomes some of the limitations of existing interferometric profilometers. Two laser beams are incident on the sample ensuring common path operation. One beam forms a tightly focused sample probe spot and the other remains collimated, acting as a large‐area, common path reference beam. Our configuration allows the relative size of the two beams to be varied both arbitrarily and independently, thus guaranteeing an accurate absolute phase measurement. Preliminary results demonstrating the operation of the system are presented.
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