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New electrostatic micromanipulator which dislodges adhered dust particles in vacuum

 

作者: Hiroshi Saeki,   Takayasu Tanaka,   Toshio Fukuda,   Ken’ichi Kudou,   Toshiro Higuchi,   Hajime Ishimaru,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1992)
卷期: Volume 10, issue 6  

页码: 2491-2492

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.586045

 

出版商: American Vacuum Society

 

关键词: DUSTS;ELECTROSTATIC DEVICES;INTEGRATED CIRCUITS;FABRICATION;DUST COLLECTORS;MANIPULATORS;PROBES;MICROELECTRONICS;DESIGN;SURFACE CLEANING

 

数据来源: AIP

 

 

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