首页   按字顺浏览 期刊浏览 卷期浏览 Molecular beam epitaxy growth method for vertical‐cavity surface‐emitting...
Molecular beam epitaxy growth method for vertical‐cavity surface‐emitting laser resonators based on substrate thermal emission

 

作者: J. J. Talghader,   M. A. Hadley,   J. S. Smith,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 67, issue 25  

页码: 3774-3776

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.115379

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A molecular beam epitaxy growth monitoring method is developed for distributed Bragg reflectors and vertical‐cavity surface‐emitting laser (VCSEL) resonators. The wavelength of the substrate thermal emission that corresponds to the optical cavity resonant wavelength is selected by a monochromator and monitored during growth. This method allows VCSEL cavities of arbitrary design wavelength to be grown with a single control program. This letter also presents a theoretical model for the technique which is based on transmission matrices and simple thermal emission properties. Demonstrated reproducibility of the method is well within 0.1%. ©1995 American Institute of Physics.

 

点击下载:  PDF (97KB)



返 回