The structure of the optical phase change memory alloy, silver–vanadium–indium–antimony–tellurium (AVIST), has been investigated by the methods of optical reflectivity change, Raman spectroscopy, and electron diffraction. In order to identify each phase, Sb, AgSb, AgSbTe, and AgInTe films were also studied. The Raman spectrum of an AVIST thin film annealed at 523 K for 1 h in Ar gas, shows two main broad peaks around 116 and150 cm−1.These peaks appear to be related to Sb vibration modes in the AVIST alloy, but their relative intensities are reversed for the AVIST films in comparison with those for a Sb film. Furthermore, in AVIST, the peak at116 cm−1shifts to lower wave number when the vanadium content is increased from 0.4 to 4.7 at &percent;. The electron diffraction pattern of AVIST alloy indicates that theAgSbTe2crystalline phase dominates rather than Sb. A model of the structure of AVIST consistent with these observations is proposed. ©1997 American Institute of Physics.