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Annular dark field electron microscope images with better than 2 A˚ resolution at 100 kV

 

作者: D. H. Shin,   E. J. Kirkland,   J. Silcox,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 55, issue 23  

页码: 2456-2458

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.102297

 

出版商: AIP

 

数据来源: AIP

 

摘要:

High‐resolution scanning transmission electron microscope (STEM) images in the annular dark field (ADF) imaging mode approaching the theoretical point‐to‐point resolution limit are presented. The ADF images were obtained from a highTcsuperconducting YBa2Cu3O7−xthin‐film specimen at 100 kV. The 1.9 A˚ resolution lattice image, which is the smallest lattice spacing in the specimen, corresponds to the minimum resolvable spatial frequency with 5% contrast in the contrast transfer function for annular dark field, and is smaller than the resolution limit given by the Rayleigh criterion. This demonstrates that STEM ADF imaging can have a resolution approximately 40% better than that of the bright field conventional transmission electron microscope (CTEM) imaging at Scherzer condition.

 

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