Annular dark field electron microscope images with better than 2 A˚ resolution at 100 kV
作者:
D. H. Shin,
E. J. Kirkland,
J. Silcox,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 55,
issue 23
页码: 2456-2458
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.102297
出版商: AIP
数据来源: AIP
摘要:
High‐resolution scanning transmission electron microscope (STEM) images in the annular dark field (ADF) imaging mode approaching the theoretical point‐to‐point resolution limit are presented. The ADF images were obtained from a highTcsuperconducting YBa2Cu3O7−xthin‐film specimen at 100 kV. The 1.9 A˚ resolution lattice image, which is the smallest lattice spacing in the specimen, corresponds to the minimum resolvable spatial frequency with 5% contrast in the contrast transfer function for annular dark field, and is smaller than the resolution limit given by the Rayleigh criterion. This demonstrates that STEM ADF imaging can have a resolution approximately 40% better than that of the bright field conventional transmission electron microscope (CTEM) imaging at Scherzer condition.
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