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Laser ablative hole formation in amorphous thin films

 

作者: A. Blatter,   C. Ortiz,  

 

期刊: Journal of Applied Physics  (AIP Available online 1993)
卷期: Volume 73, issue 12  

页码: 8552-8560

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.353385

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Laser ablative hole formation in amorphous Te‐Se‐I films was studied by microscopy and transient reflectivity measurements. Laser pulses of variable power and length were focused to either 0.8 or 10 &mgr;m spots on the films which were deposited on glass and polycarbonate substrates. The important feature of these films was that they did not crystallize upon pulsed laser irradiation. This allowed the examination of dependences on experimental parameters without the complication of phase transitions. The absence of a crystal‐melt interface in the films enabled the ablation of holes with exceptionally smooth rims. The experiments confirm that hole formation is by material flow, induced by the laser heating, radially away from the irradiation center. We show that the hole opening is a thermally activated process limited by viscous flow. A barrier of 0.7 eV is derived for the Te‐Se‐I films. Film viscosity and substrate thermal properties are identified as the key variables by which the dynamics of the process can be affected and the final shape of the hole thereby controlled.

 

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