This work describes some investigations on the atomic and ionic beams generated by a CdS target under excimer laser irradiation at 308 nm, and on factors influencing the quality of the films obtained. The angular distribution of particles emitted in a vacuum was found to be highly directional, concentrated around a direction normal to the target surface. The angular emission pattern depends on laser fluence. The method used for studying the emission pattern helps in positioning substrates for optimum film quality and uniformity. Measurements of the energy of the emitted particles yielded high values (several tens of eV) for both ionized and neutral particles, suggesting a nonthermal mechanism. Some possible models are discussed. Finally, considerable improvement in both film uniformity and homogeneity was obtained through the use of a laser‐triggered plasma discharge in the source region. ©1995 American Institute of Physics.