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Design parameters for differentially pumped rotating platforms

 

作者: M. R. Columbia,   P. A. Thiel,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1987)
卷期: Volume 58, issue 2  

页码: 309-310

 

ISSN:0034-6748

 

年代: 1987

 

DOI:10.1063/1.1139277

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have constructed a large differentially pumped platform for use in ultrahigh vacuum. The design utilizes spring‐loaded Teflon seals to permit differential pumping between two horizontal stainless‐steel disks. This allows the rotation of the upper disk and the items built into it directly inside a vacuum chamber while maintaining a pressure of 2×10−10Torr. The following design parameters are discussed: conductance across the seals, deflection of the seals, rotational friction, and differential thermal expansion during bakeout.

 

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