Design parameters for differentially pumped rotating platforms
作者:
M. R. Columbia,
P. A. Thiel,
期刊:
Review of Scientific Instruments
(AIP Available online 1987)
卷期:
Volume 58,
issue 2
页码: 309-310
ISSN:0034-6748
年代: 1987
DOI:10.1063/1.1139277
出版商: AIP
数据来源: AIP
摘要:
We have constructed a large differentially pumped platform for use in ultrahigh vacuum. The design utilizes spring‐loaded Teflon seals to permit differential pumping between two horizontal stainless‐steel disks. This allows the rotation of the upper disk and the items built into it directly inside a vacuum chamber while maintaining a pressure of 2×10−10Torr. The following design parameters are discussed: conductance across the seals, deflection of the seals, rotational friction, and differential thermal expansion during bakeout.
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