Structure of (&sqrt;3×&sqrt;3) R 30°‐B at the Si interface studied by grazing incidence x‐ray diffraction
作者:
Koichi Akimoto,
Ichiro Hirosawa,
Toru Tatsumi,
Hiroyuki Hirayama,
Jun’ichiro Mizuki,
Junji Matsui,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 13
页码: 1225-1227
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.102522
出版商: AIP
数据来源: AIP
摘要:
The boron‐induced ( 7/8 × 7/8 )R30° reconstruction at the Si interface has been investigated by grazing incidence x‐ray diffraction. The in‐plane projected struture is found from the structure factors near zero perpendicular momentum transfer. At thea‐Si/Si (111) interface, boron atoms at 1/3 ML are substituted for silicon atoms, thus forming a ( 7/8 × 7/8 )R30° lattice and the boronsilicon bond is contracted compared with the siliconsilicon bond. Even at the interface between a solid phase epitaxial Si (111) layer and a Si (111) substrate, the boron‐induced ( 7/8 × 7/8 )R30° reconstruction has also been observed and the structure is similar to that observed at thea‐Si/Si (111) interface.
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