Effect of preacceleration voltage upon ion‐beam divergence
作者:
J. H. Whealton,
L. R. Grisham,
C. C. Tsai,
W. L. Stirling,
期刊:
Journal of Applied Physics
(AIP Available online 1978)
卷期:
Volume 49,
issue 6
页码: 3091-3101
ISSN:0021-8979
年代: 1978
DOI:10.1063/1.325299
出版商: AIP
数据来源: AIP
摘要:
The effect of an insulator coating on the plasma electrode of a duoPIGatron ion source on ion‐beam optics was examined theoretically and experimentally. The effect of a preacceleration potential, applied between the insulated electrode and the target cathode of the source plasma, on ion optics was also examined. A principal result is that this electrode arrangement with precel gives a much lower beam divergence than the same arrangement without precel. Detailed comparisons between the data and calculations are presented.
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