Initial stages of InAs deposition on EuBa2Cu3O7−y(EBCO) thin‐film superconductors with a SrF2interlayer are investigated by using synchrotron‐radiation photoelectron spectroscopy. Core‐level and valence‐band spectra can give imformation on both oxidation of InAs and reduction of the underlying EBCO with a very thin surface layer. These spectral evolutions demonstrate that SrF2does not affect the underlying EBCO, and that the two‐step growth procedure, comprising the initial InAs layer growth at room temperature and the top InAs layer growth at 200 °C, is effective in suppressing the interfacial redox reactions. Furthermore, cross‐sectional transmission electron microscopy and x‐ray‐diffraction studies comfirm that SrF2forms a uniform layer on the EBCO surface, and that the two‐step growth process can crystallize an InAs top layer, which is highly (111) oriented with a full width at half‐maximum of 0.25°.