首页   按字顺浏览 期刊浏览 卷期浏览 Nozzle beam evaporant source
Nozzle beam evaporant source

 

作者: R. J. Ney,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1983）
卷期: Volume 1, issue 1  

页码: 55-59

 

ISSN:0734-2101

 

年代: 1983

 

DOI:10.1116/1.572310

 

出版商: American Vacuum Society

 

关键词: design;performance;gold;nozzles;chemical vapor deposition;beam production

 

数据来源: AIP

 

摘要:

This report describes the design and operation of a unique‐nozzle‐beam gold deposition source that operates for extended periods of time without reloading. The source puts out a narrow beam of gold typically in the order of 2‐1/2° included ‘‘cone’’ angle. Maximum deposition rates are in the order of 1600 Å/min at 2.5 in. ‘‘throw’’ distances.

 

点击下载:  PDF (905KB)



返 回