Origin of dislocation-related photoluminescence bands in very thin silicon–germanium layers grown on silicon substrates
作者:
Hosun Lee,
Suk-Ho Choi,
T.-Y. Seong,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 26
页码: 3823-3825
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.120516
出版商: AIP
数据来源: AIP
摘要:
We measured the photoluminescence spectra of very thin and partially strainedSi1−xGex(0.2⩽x⩽0.5)layers grown on silicon substrates with varying degrees of strain relaxation. We observed photoluminescence lines, so-calledDlines, which arise from dislocations in theSi1−xGex/Sialloys. Surprisingly, we observed noDlines originating from theSi1−xGexlayers. We identify the origin of theDlines as the penetrated dislocations in the Si substrates extending from the SiGe/Si interface with the assistance of transmission electron microscopy. We discuss possible mechanisms of the dominance of luminescence from the dislocations in the Si substrates over those in the SiGe layers. ©1997 American Institute of Physics.
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