Modification of Optical Properties of a-C:H and a-C:H:N Films Subjected to Ion Implantation and UV Treatment
作者:
W.P. Piryatinskii,
N.I. Klyui,
A.B. Romanyuk,
V.A. Semenovich,
期刊:
Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals
(Taylor Available online 1998)
卷期:
Volume 324,
issue 1
页码: 19-24
ISSN:1058-725X
年代: 1998
DOI:10.1080/10587259808047128
出版商: Taylor & Francis Group
关键词: carbon films;UV treatment;ion implantation;photoluminescence
数据来源: Taylor
摘要:
Optical properties of a-C:H and a-C:H:N films subjected to UV and proton irradiations have been investigated by photoluminescence (PL) and spectral ellipsometry (SE) methods. It was shown that the optical properties and PL mechanism of a-C:H:N films depend strongly on nitrogen concentration in the films. a-C:H:N films with high nitrogen content are more tolerant to UV-treatment. In all cases, proton implantation leads to some quenching of luminescence due to introduction of non-radiative recombination centers.
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