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Modification of Optical Properties of a-C:H and a-C:H:N Films Subjected to Ion Implantation and UV Treatment

 

作者: W.P. Piryatinskii,   N.I. Klyui,   A.B. Romanyuk,   V.A. Semenovich,  

 

期刊: Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals  (Taylor Available online 1998)
卷期: Volume 324, issue 1  

页码: 19-24

 

ISSN:1058-725X

 

年代: 1998

 

DOI:10.1080/10587259808047128

 

出版商: Taylor & Francis Group

 

关键词: carbon films;UV treatment;ion implantation;photoluminescence

 

数据来源: Taylor

 

摘要:

Optical properties of a-C:H and a-C:H:N films subjected to UV and proton irradiations have been investigated by photoluminescence (PL) and spectral ellipsometry (SE) methods. It was shown that the optical properties and PL mechanism of a-C:H:N films depend strongly on nitrogen concentration in the films. a-C:H:N films with high nitrogen content are more tolerant to UV-treatment. In all cases, proton implantation leads to some quenching of luminescence due to introduction of non-radiative recombination centers.

 

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