Abstract—We study the efficiency of a novel flow-type combustion system designed to bum toxic and inflammable effluent gases from a low pressure Metal-Organic Vapor Phase Epitaxy (MOVPE) reactor. The combustion reaction of the toxic and flammable gases has been optimized. We report on the kinetics of phosphine pyrolysisand oxidation, finding that for the total gas flows introduced into the combustion chamber (10-25 SLM) the transit time (≥1s) does not limit the conversion efficieney. The measured reaction's activation energy is 38 (+\· 7) kcal/mole, which is higher than values which have appeared in the literature for the combustion of phosphine and comparable to the value published for the heterogeneous decomposition of this gas.