Multiple‐Heater Turret for Vapor Deposition
作者:
John G. Simmons,
Douglas E. Moister,
期刊:
Review of Scientific Instruments
(AIP Available online 1962)
卷期:
Volume 33,
issue 9
页码: 978-980
ISSN:0034-6748
年代: 1962
DOI:10.1063/1.1718044
出版商: AIP
数据来源: AIP
摘要:
A rotary multiple‐filament turret is described which permits sequential vapor deposition of several materials from the same position within a vacuum chamber, thereby eliminating angle‐of‐incidence problems at the receiving surface of the substrate. No dynamic feed‐throughs are used in the system, and only one high‐current feed‐through is used, thus minimizing high‐vacuum leaks.
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