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Multiple‐Heater Turret for Vapor Deposition

 

作者: John G. Simmons,   Douglas E. Moister,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1962)
卷期: Volume 33, issue 9  

页码: 978-980

 

ISSN:0034-6748

 

年代: 1962

 

DOI:10.1063/1.1718044

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A rotary multiple‐filament turret is described which permits sequential vapor deposition of several materials from the same position within a vacuum chamber, thereby eliminating angle‐of‐incidence problems at the receiving surface of the substrate. No dynamic feed‐throughs are used in the system, and only one high‐current feed‐through is used, thus minimizing high‐vacuum leaks.

 

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