Sputtering of chlorinated silicon surfaces studied by secondary ion mass spectrometry and ion scattering spectroscopy
作者:
E. L. Barish,
D. J. Vitkavage,
T. M. Mayer,
期刊:
Journal of Applied Physics
(AIP Available online 1985)
卷期:
Volume 57,
issue 4
页码: 1336-1342
ISSN:0021-8979
年代: 1985
DOI:10.1063/1.334536
出版商: AIP
数据来源: AIP
摘要:
We have studied the sputtering of chlorinated Si surfaces by 1‐keV Ne+impact using secondary ion mass spectrometry and low‐energy ion scattering spectroscopy. Under steady‐state conditions of submonolayer Cl coverage, SiCl+xions (x=0–3) are all observed with identical coverage dependence. Cross sections for removal of Cl from Si are independent of initial coverage in the submonolayer regime. Sputter cross sections increase from 0.5×10−15cm2at normal incidence to a maximum of 22×10−15cm2at ∼70° angle of incidence. Secondary ion yields are shown to be markedly dependent on the presence of recoil‐implanted Cl in the substrate. The details of Cl sputtering and Si removal processes in ion‐assisted etching suggest a major role for recoil implantation of Cl into the Si lattice in formation and removal of SiClxproducts in etching reactions.
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