Change of the surface density of the midgap level (EL2 or EL0) in bulk GaAs by heat treatments with various capping
作者:
Fumio Hasegawa,
Norio Yamamoto,
Yasuo Nannichi,
期刊:
Applied Physics Letters
(AIP Available online 1984)
卷期:
Volume 45,
issue 4
页码: 461-463
ISSN:0003-6951
年代: 1984
DOI:10.1063/1.95216
出版商: AIP
数据来源: AIP
摘要:
Change of the surface density of the midgap level (EL2 or EL0) in bulk GaAs by heat treatment was studied on horizontal Bridgman (HB) and liquid encapsulated Czochralski (LEC) grown GaAs by changing the capping materials (Si3N4, SiO2, GaAs) and the ambient (H2, vaccum). Decrease of the surface density of the midgap level was prevented on HB GaAs by capping with Si3N4, SiO2or GaAs, whereas it could not on LEC GaAs when it is capped with Si3N4or SiO2. Emission rates of the midgap level in LEC GaAs changed by the heat treatment but it did not for HB GaAs. These results support that the midgap levels in HB and LEC GaAs are due to different point defects (EL2 or EL0).
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