Erratum: Asymmetry aberrations and tolerancing of complete systems of electron lenses and deflectors [J. Vac. Sci. Technol. B8, 1676 (1990)]

 

作者: Haoning Liu,   Xieqing Zhu,   Eric Munro,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1991）
卷期: Volume 9, issue 1  

页码: 184-184

 

ISSN:1071-1023

 

年代: 1991

 

DOI:10.1116/1.585783

 

出版商: American Vacuum Society

 

数据来源: AIP

 

 

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