Piezoelectric properties of lead zirconate titanate thin films characterized by the pneumatic loading method
作者:
Dong-Guk Kim,
Ho-Gi Kim,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1999)
卷期:
Volume 24,
issue 1-4
页码: 107-119
ISSN:1058-4587
年代: 1999
DOI:10.1080/10584589908215583
出版商: Taylor & Francis Group
关键词: piezoelectric coefficient;pneumatic loading method;PZT
数据来源: Taylor
摘要:
Although there are many studies for the characterization of piezoelectric thin film, it is still strongly needed to develop the easy and practical way to measure the piezoelectricity existing in thin film. Piezoelectric properties of lead zirconate titanate (PZT) thin film were investigated by a new pneumatic loading method, which has been devised as a more reliable and convenient characterization technique. We have observed the aging phenomena and have examined the effects of poling voltage and time on piezoelectric properties of the PZT thin films. There was no built-in piezoelectricity in virgin films.
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