The effect of substrate misorientation on the photoluminescence properties of GaN grown on sapphire by metalorganic chemical vapor deposition
作者:
P. A. Grudowski,
A. L. Holmes,
C. J. Eiting,
R. D. Dupuis,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 69,
issue 24
页码: 3626-3628
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.117004
出版商: AIP
数据来源: AIP
摘要:
We report the growth and photoluminescence (300 and 4.2 K) characterization of unintentionally doped GaN on both exact and vicinal (0001) sapphire substrates. The GaN heteroepitaxial layers are grown by metalorganic chemical vapor deposition on sapphire substrates using various growth conditions. The (0001) Al2O3c‐plane substrates are oriented exactly (0001) or misoriented either 2° towards theaplane (112¯0), 5° towards themplane (101¯0), or 9° toward themplane. A comparison of the 300 and 4.2 K optical characteristics of the samples grown on the different substrates indicates that a higher photoluminescence intensity is measured for the films on misoriented substrates. ©1996 American Institute of Physics.
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