Electron‐beam‐induced resist and aluminum formation
作者:
Akira Ishibashi,
Kenji Funato,
Yoshifumi Mori,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 1
页码: 169-172
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585281
出版商: American Vacuum Society
关键词: ALUMINIUM;ORGANOMETALLIC COMPOUNDS;ELECTRON BEAMS;MASKING;VLSI;EPITAXY;FILM GROWTH;METHYL COMPOUNDS;NAPHTHALENE;ELECTRON COLLISIONS;ALKYL COMPOUNDS;RESISTS;ATOMIC BEAM EPITAXY
数据来源: AIP
摘要:
We have grown electron‐beam‐induced resist and aluminum from alkyl naphthalene and trimethyl aluminum, respectively. The growth mechanism of the electron‐beam‐induced materials has been suggested to be bridge‐formation by the physically adsorbed molecules of the sources. We believe that the bridge‐formation is driven by direct interaction with electrons, not by diffusive processes such as local heating and catalytic reactions. The observed growth rate is consistent with the one calculated from the heat of physical adsorption. The method is of potential interest for stereo‐resist and also for selective atomic layer epitaxy.
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