Strain mapping in [111] and [001] InGaAs/GaAs superlattices
作者:
U. D. Venkateswaran,
L. J. Cui,
M. Li,
B. A. Weinstein,
K. Elcess,
C. G. Fonstad,
C. Mailhiot,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 3
页码: 286-288
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.102810
出版商: AIP
数据来源: AIP
摘要:
Raman area maps measuring the strain in lattice‐mismatched [111] and [001] oriented InxGa1−xAs/GaAs superlattices (x=0.1, 0.17) are presented and compared with independent x‐ray rocking curve studies of the average strain in the same samples. We find that the LO phonon frequency, but not the TO frequency, is a valid measure of strain for [111] oriented superlattices exhibiting one‐mode behavior. This is explained by the lack of compensation between the effects of alloying and strain for the TO mode in InxGa1−xAs. The capability to nondestructively map small growth variations in superlattice and buffer layer constituents is demonstrated.
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