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On the use of dust plasma acoustic waves for the diagnostic of nanometer-sized contaminant particles in plasmas

 

作者: U. Kortshagen,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 2  

页码: 208-210

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119502

 

出版商: AIP

 

数据来源: AIP

 

摘要:

During the phase of dust nucleation in plasma enhanced chemical vapor deposition systems, nanometer-sized dust particles appear in large concentrations. The dispersion characteristics of dust acoustic waves in such a plasma during the nucleation phase is analyzed. It is shown that the dispersion properties of the dust acoustic wave depend sensitively on the particle size. It is proposed to use dust acoustic waves as a novel particle size diagnostic for nanometer-sized particles. ©1997 American Institute of Physics.

 

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