Role of boron in electrical properties of semi‐insulating GaAs grown by the liquid encapsulated Czochralski method
作者:
Jiro Osaka,
Fumiaki Hyuga,
Takashi Kobayashi,
Yutaka Yamada,
Fumio Orito,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 50,
issue 4
页码: 191-193
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.97658
出版商: AIP
数据来源: AIP
摘要:
The effects of the predominant residual impurity boron on the electrical properties of In‐doped, dislocation‐free, semi‐insulating GaAs crystals are investigated. Crystals are grown from various arsenic‐rich melts using the vertical magnetic field applied, fully encapsulated Czochralski technique. It is found that carrier and neutral EL2 concentrations in as‐grown crystal and sheet carrier concentration in the Si‐implanted active layer decrease as the boron concentration increases. The effect of boron decreases as the melt composition becomes more arsenic rich. The results suggest that boron decreases the Ga vacancy concentration.
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