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The diffusivity of silicon self-interstitials

 

作者: W. Taylor,   B.P. R. Marioton,   T.Y. Tan,   U. Gösele,  

 

期刊: Radiation Effects and Defects in Solids  (Taylor Available online 1989)
卷期: Volume 111-112, issue 1-2  

页码: 131-150

 

ISSN:1042-0150

 

年代: 1989

 

DOI:10.1080/10420158908212989

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The diffusivityD1of silicon self-interstitials plays an important role in the quantitative modeling of many technological processes for microelectronic and photovoltaic silicon devices. Examples are swirl-defect formation during crystal growth, oxygen precipitation, oxidation-enhanced diffusion, oxidation-induced stacking faults, gettering phenomena, and non-equilibrium effects associated with high-concentration phosphorus diffusion. This paper reviews the various attempts to measure or estimateD1, which in spite of all the effort remains a fairly elusive quantity partly because of interactions of self-interstitials with coexisting vacancies and sinks in the material.

 

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