The diffusivity of silicon self-interstitials
作者:
W. Taylor,
B.P. R. Marioton,
T.Y. Tan,
U. Gösele,
期刊:
Radiation Effects and Defects in Solids
(Taylor Available online 1989)
卷期:
Volume 111-112,
issue 1-2
页码: 131-150
ISSN:1042-0150
年代: 1989
DOI:10.1080/10420158908212989
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The diffusivityD1of silicon self-interstitials plays an important role in the quantitative modeling of many technological processes for microelectronic and photovoltaic silicon devices. Examples are swirl-defect formation during crystal growth, oxygen precipitation, oxidation-enhanced diffusion, oxidation-induced stacking faults, gettering phenomena, and non-equilibrium effects associated with high-concentration phosphorus diffusion. This paper reviews the various attempts to measure or estimateD1, which in spite of all the effort remains a fairly elusive quantity partly because of interactions of self-interstitials with coexisting vacancies and sinks in the material.
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