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Microstructure of novel superhard nanocrystalline-amorphous composites as analyzed by high resolution transmission electron microscopy

 

作者: S. Christiansen,   M. Albrecht,   H. P. Strunk,   Stan Veprek,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1998)
卷期: Volume 16, issue 1  

页码: 19-22

 

ISSN:1071-1023

 

年代: 1998

 

DOI:10.1116/1.589778

 

出版商: American Vacuum Society

 

关键词: TiN

 

数据来源: AIP

 

摘要:

The recently developed, novel superhard nanocrystalline compositesnc-TiN/a-Si3N4have been investigated by means of high resolution transmission electron microscopy. The microstructure consisting of nanocrystalline TiN imbedded withina⩽1 nmthin amorphousSi3N4,the relative amount of both phases, and the TiN-crystallite size which were previously determined by means of x-ray diffraction and energy dispersive analysis of x rays have been directly confirmed.

 

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