Microstructure of novel superhard nanocrystalline-amorphous composites as analyzed by high resolution transmission electron microscopy
作者:
S. Christiansen,
M. Albrecht,
H. P. Strunk,
Stan Veprek,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1998)
卷期:
Volume 16,
issue 1
页码: 19-22
ISSN:1071-1023
年代: 1998
DOI:10.1116/1.589778
出版商: American Vacuum Society
关键词: TiN
数据来源: AIP
摘要:
The recently developed, novel superhard nanocrystalline compositesnc-TiN/a-Si3N4have been investigated by means of high resolution transmission electron microscopy. The microstructure consisting of nanocrystalline TiN imbedded withina⩽1 nmthin amorphousSi3N4,the relative amount of both phases, and the TiN-crystallite size which were previously determined by means of x-ray diffraction and energy dispersive analysis of x rays have been directly confirmed.
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