Energy distribution measurement of a gallium liquid metal ion source modulated at high frequency by a focused laser beam
作者:
Li Zhou,
Fred Holmes,
Jon Orloff,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 5
页码: 2593-2595
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585698
出版商: American Vacuum Society
关键词: ION SOURCES;GALLIUM IONS;MODULATION;LASER BEAMS;BEAM CURRENTS
数据来源: AIP
摘要:
The emission current of a gallium liquid metal ion source (LMIS) was modulated at 500 KHz by focusing a modulated laser beam to 20 μm diam on the tip of LMIS. The peak‐to‐peak amplitude of the modulated ion current was 300 nA when the average laser power was 15 mW with 83% modulation depth, when the ion source was operated at 1–10‐μA dc emission current range. Total energy distributions of ions emitted by the LMIS were measured with and without modulation. We found minimal difference between the energy distributions spread with and without modulation, to within the experimental error.
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