The National Institute of Standards and Technology metrology development for the semiconductor industry and its supporting infrastructure is a broad set of programs directed at many of the critical metrology needs. This paper will give examples of specific projects addressing needs in lithography, critical dimension and overlay, gate dielectric characterization, interconnect materials, and manufacturing support. The paper will emphasize the role collaboration with industry plays in project selection, project success, and transfer to industry. © 2003 American Institute of Physics