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A femtojoule calorimeter using micromechanical sensors

 

作者: J. R. Barnes,   R. J. Stephenson,   C. N. Woodburn,   S. J. O’Shea,   M. E. Welland,   T. Rayment,   J. K. Gimzewski,   Ch. Gerber,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1994)
卷期: Volume 65, issue 12  

页码: 3793-3798

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1144509

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We describe a highly sensitive new type of calorimeter based on the deflection of a ‘‘bimetallic’’ micromechanical sensor as a function of temperature. The temperature changes can be due to ambient changes, giving a temperature sensor or, more importantly, due to the heat absorbed by a coating on the sensor, giving a heat sensor. As an example we show the results of using the sensor as a photothermal spectrometer. The small dimensions and low thermal mass of the sensor make it highly sensitive and we demonstrate a sensitivity of roughly 100 pW. By applying a simple model of the system the ultimate sensitivity is expected to be of the order of 10 pW. The thermal response time of the cantilever can also be determined, giving an estimate of the minimum detectable energy of the sensor. This we find to be 150 fJ and again from our model, expect a minimum value of the order of 20 fJ.

 

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