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Transmission electron microscope investigation of the growth of copper precipitate colonies in silicon

 

作者: E. Nes,   J. Washburn,  

 

期刊: Journal of Applied Physics  (AIP Available online 1973)
卷期: Volume 44, issue 8  

页码: 3682-3688

 

ISSN:0021-8979

 

年代: 1973

 

DOI:10.1063/1.1662820

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The growth of copper precipitate colonies in high‐purity dislocation‐free silicon single crystals has been examined by transmission electron microscopy. The colonies, being coplanar arrangements of copper‐silicide particles on either {110} or {100) planes, nucleate and grow during rapid cooling from higher temperatures. The kinetics of the colony growth process has been analyzed in terms of a model based on repeated nucleation on a climbing dislocation. The possibility of having the growing copper‐silicide particles dragged by the dislocations has been discussed, and a mechanism based on a particle dragging/dislocation climb effect has been suggested in order to explain the development of dendritic dislocation dipole branches.

 

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