Long range constant force profiling for measurement of engineering surfaces
作者:
L. P. Howard,
S. T. Smith,
期刊:
Review of Scientific Instruments
(AIP Available online 1992)
卷期:
Volume 63,
issue 10
页码: 4289-4295
ISSN:0034-6748
年代: 1992
DOI:10.1063/1.1143727
出版商: AIP
数据来源: AIP
摘要:
A new instrument bridging the gap between atomic force microscopes (AFMs) and stylus profiling instruments is described. Theconstantforceprofileris capable of subnanometer resolution over a 15‐&mgr;m vertical range with a horizontal traverse length of 50 mm. This long traverse length, coupled with the possibilities of utilizing standard radius, diamond measurement styli, make the force profiler more compatible with existing profiling instrument standards. The forces between the specimen and a diamond stylus tipped cantilever spring are sensed as displacements using a capacitance bridge. This displacement signal is then fed through a proportional plus integral controller to a high stability piezoelectric actuator to maintain a constant tip‐to‐sample force of approximately 100 nN. Much of the sensor head and traverse mechanism is made of Zerodur glass‐ceramic to provide the thermal stability needed for long travel measurements. Profiles of a 30‐nm silica step height standard and an 8.5‐&mgr;m step etched on Zerodur are presented.
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