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Organometallic vapor phase epitaxial growth of GaAs‐based pseudomorphic modulation‐doped field‐effect transistor structures

 

作者: Alan G. Thompson,   Bor‐Yen Mao,   Gi Young Lee,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 55, issue 21  

页码: 2208-2210

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.102062

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report the preparation of InGaAs/AlGaAs strained‐layer(pseudomorphic) modulation‐doped field‐effect transistor (MODFET) structures by organometallic vapor phase epitaxy (OMVPE). Devices fabricated from these structures with 0.9 &mgr;m gate lengths had dc extrinsic transconductances up to 340 mS/mm. Microwave testing up to 40 GHz showed current gain cutoff frequencies ( fT) of 22 GHz and estimated maximum frequency of oscillation ( fmax) of 70 GHz. This is the first report to our knowledge of the use of OMVPE material in the fabrication of pseudomorphic MODFETs.

 

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