Organometallic vapor phase epitaxial growth of GaAs‐based pseudomorphic modulation‐doped field‐effect transistor structures
作者:
Alan G. Thompson,
Bor‐Yen Mao,
Gi Young Lee,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 55,
issue 21
页码: 2208-2210
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.102062
出版商: AIP
数据来源: AIP
摘要:
We report the preparation of InGaAs/AlGaAs strained‐layer(pseudomorphic) modulation‐doped field‐effect transistor (MODFET) structures by organometallic vapor phase epitaxy (OMVPE). Devices fabricated from these structures with 0.9 &mgr;m gate lengths had dc extrinsic transconductances up to 340 mS/mm. Microwave testing up to 40 GHz showed current gain cutoff frequencies ( fT) of 22 GHz and estimated maximum frequency of oscillation ( fmax) of 70 GHz. This is the first report to our knowledge of the use of OMVPE material in the fabrication of pseudomorphic MODFETs.
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