Calculations of the sputtering energy reflection coefficient for hydrogen plasma ion bombardment on carbon surfaces
作者:
C.A. Ordonez,
W.D. Booth,
R. Carrera,
M.E. Oakes,
期刊:
Radiation Effects and Defects in Solids
(Taylor Available online 1991)
卷期:
Volume 116,
issue 1-2
页码: 37-47
ISSN:1042-0150
年代: 1991
DOI:10.1080/10420159108221343
出版商: Taylor & Francis Group
关键词: sputtering;reflection;plasma;sheath;surface;interactions
数据来源: Taylor
摘要:
Monte Carlo calculations have been carried out for the sputtering energy reflection coefficient (YE) of plasma ions incident on a carbon surface. The calculations incorporate a simulation of the velocity distribution of plasma ions incident on a surface with a floating potential. The average energy of an ion can increase by more than a factor of three as a result of this potential and the effect onYEcan be significant. An analytic form forYEis constructed expressed in terms of the ion plasma temperature and the surface floating potential. The new model provides a fast and accurate means to calcualteYE.
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