X‐ray topographic observation of dark‐line defects in GaAs‐Ga1−xAlxAs double‐heterostructure wafers
作者:
Seigoˆ Kishino,
Hisao Nakashima,
Naoki Chinone,
Ryoichi Ito,
期刊:
Applied Physics Letters
(AIP Available online 1976)
卷期:
Volume 28,
issue 2
页码: 98-100
ISSN:0003-6951
年代: 1976
DOI:10.1063/1.88655
出版商: AIP
数据来源: AIP
摘要:
Optically induced dark‐line defects (DLD’s) in GaAs‐Ga1−xAlxAs double‐heterostructure (DH) wafers have been observed by x‐ray topography for the first time using the x‐ray anomalous transmission effect. This topography, which is sensitive to defects in the thin epitaxial layers, has been successfully applied to the observation. As a result, it has been observed that DLD’s oriented along 〈110〉 directions are composed of dislocations with Burgers vectors of (1/2)a〈110〉 parallel to the growth surface. It is also shown that the DLD’s originate from both substrate dislocations and crystal edges.
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