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X‐ray topographic observation of dark‐line defects in GaAs‐Ga1−xAlxAs double‐heterostructure wafers

 

作者: Seigoˆ Kishino,   Hisao Nakashima,   Naoki Chinone,   Ryoichi Ito,  

 

期刊: Applied Physics Letters  (AIP Available online 1976)
卷期: Volume 28, issue 2  

页码: 98-100

 

ISSN:0003-6951

 

年代: 1976

 

DOI:10.1063/1.88655

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Optically induced dark‐line defects (DLD’s) in GaAs‐Ga1−xAlxAs double‐heterostructure (DH) wafers have been observed by x‐ray topography for the first time using the x‐ray anomalous transmission effect. This topography, which is sensitive to defects in the thin epitaxial layers, has been successfully applied to the observation. As a result, it has been observed that DLD’s oriented along ⟨110⟩ directions are composed of dislocations with Burgers vectors of (1/2)a⟨110⟩ parallel to the growth surface. It is also shown that the DLD’s originate from both substrate dislocations and crystal edges.

 

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