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Enhancement of the specific output energy of an electron‐beam pumped KrF laser by using Ne as the main buffer gas

 

作者: T. Gerber,   P. J. M. Peters,   H. M. J. Bastiaens,   W. J. Witteman,  

 

期刊: Applied Physics Letters  (AIP Available online 1984)
卷期: Volume 45, issue 4  

页码: 356-357

 

ISSN:0003-6951

 

年代: 1984

 

DOI:10.1063/1.95268

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Optimization of a Ne/Ar/Kr/F2gas mixture with respect to maximum KrF laser output has been performed. As an excitation source a transverse electron beam with a pulse length of 10 ns was used. The laser output obtained with a typical Ne/Ar/Kr/F2mixture containing mainly Ne was found to increase linearly with Ne partial pressure. At a pressure of 14 bar the laser output energy exceeds the one achieved with an optimized Ar/Kr/F2mixture by a factor of 4.5.

 

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