Enhancement of the specific output energy of an electron‐beam pumped KrF laser by using Ne as the main buffer gas
作者:
T. Gerber,
P. J. M. Peters,
H. M. J. Bastiaens,
W. J. Witteman,
期刊:
Applied Physics Letters
(AIP Available online 1984)
卷期:
Volume 45,
issue 4
页码: 356-357
ISSN:0003-6951
年代: 1984
DOI:10.1063/1.95268
出版商: AIP
数据来源: AIP
摘要:
Optimization of a Ne/Ar/Kr/F2gas mixture with respect to maximum KrF laser output has been performed. As an excitation source a transverse electron beam with a pulse length of 10 ns was used. The laser output obtained with a typical Ne/Ar/Kr/F2mixture containing mainly Ne was found to increase linearly with Ne partial pressure. At a pressure of 14 bar the laser output energy exceeds the one achieved with an optimized Ar/Kr/F2mixture by a factor of 4.5.
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