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Predeposition through a polysilicon layer as a tool to reduce anomalies in phosphorus profiles and the push-out effect inn-p-ntransistors

 

作者: M.Finetti,   G.Masetti,   P.Negrini,   S.Solmi,  

 

期刊: IEE Proceedings I (Solid-State and Electron Devices)  (IET Available online 1980)
卷期: Volume 127, issue 1  

页码: 37-41

 

年代: 1980

 

DOI:10.1049/ip-i-1.1980.0007

 

出版商: IEE

 

数据来源: IET

 

摘要:

The carrier concentration profiles obtained after the diffusion of phosphorus through a thin polycrystalline silicon film into a silicon substrate are investigated. It is shown that it is possible, by performing the predeposition process at 1000°C or 920°C, to avoid or greatly lower the high-diffusivity tail usually present in phosphorus profiles. It is also reported that, in sutable experimental conditions, predepositions through a polycrystalline layer reduce the push-out effect under the emitter ofn-p-nbipolar transistors. The results are explanined on the basis of an interstitial-phosphorus-difussion mechanism in silicon, and by supposing that the excess of interstitials generated by the ingoningpatoms is partially adsorbed at the grain boundareis of the polycrystalline film.

 

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