Predeposition through a polysilicon layer as a tool to reduce anomalies in phosphorus profiles and the push-out effect inn-p-ntransistors
作者:
M.Finetti,
G.Masetti,
P.Negrini,
S.Solmi,
期刊:
IEE Proceedings I (Solid-State and Electron Devices)
(IET Available online 1980)
卷期:
Volume 127,
issue 1
页码: 37-41
年代: 1980
DOI:10.1049/ip-i-1.1980.0007
出版商: IEE
数据来源: IET
摘要:
The carrier concentration profiles obtained after the diffusion of phosphorus through a thin polycrystalline silicon film into a silicon substrate are investigated. It is shown that it is possible, by performing the predeposition process at 1000°C or 920°C, to avoid or greatly lower the high-diffusivity tail usually present in phosphorus profiles. It is also reported that, in sutable experimental conditions, predepositions through a polycrystalline layer reduce the push-out effect under the emitter ofn-p-nbipolar transistors. The results are explanined on the basis of an interstitial-phosphorus-difussion mechanism in silicon, and by supposing that the excess of interstitials generated by the ingoningpatoms is partially adsorbed at the grain boundareis of the polycrystalline film.
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