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Monte Carlo simulation of ion beam penetration in solids

 

作者: Ilesanmi Adesida,   Leonidas Karapiperis,  

 

期刊: Radiation Effects  (Taylor Available online 1982)
卷期: Volume 61, issue 3-4  

页码: 223-233

 

ISSN:0033-7579

 

年代: 1982

 

DOI:10.1080/00337578208229936

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The essential features of a Monte Carlo program which simulates the scattering and the retardation of energetic ions in amorphous targets are presented. The new experimentally derived universal scattering cross-section of Kalbitzer and Oetzmann is used to describe nuclear scattering events. For electronic energy loss, the Lindhard-Scharff and Bethe formulae are used. The program was primarily developed to study the spatial distribution of ion deposited energy for lithographic applications. However, for initial verification, the program has been used to study the fundamental characteristics of ion transport for various ion-target combinations. The theoretical predictions obtained using the above expressions for nuclear scattering and electronic energy loss are shown to agree very well with experimental results.

 

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