Microfabrication of an electroluminescent polymer light emitting diode pixel array
作者:
Salman Noach,
Erez Z. Faraggi,
Gil Cohen,
Yair Avny,
Ronny Neumann,
Dan Davidov,
Aaron Lewis,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 69,
issue 24
页码: 3650-3652
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.117012
出版商: AIP
数据来源: AIP
摘要:
We describe a method to microfabricate a light emitting diode array with pixels based on conjugated electroluminescent polymers sandwiched between appropriate electrodes. This method, based on direct photoablation with the 193 nm emission of an excimer laser, maintains the properties of these unique polymers. The technique as described here has already achieved an array of 20 &mgr;m×20 &mgr;m pixels with enhanced electroluminescence (EL) from these pixels and possible spectral tuning of the EL by the application of varying external field. This method can be extended to achieve nanometer dimensionalities using near‐field nanolithography. ©1996 American Institute of Physics.
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