Investigations of sputtered strontium titanate films with typical thicknesses of 1 μm demonstrate that the electrical conductivity [sgrave] of these thin films exhibits a dependence on the oxygen partial pressure P(O2) that is typical for this material and is similar to that of polycrystalline bulk materials or single crystals. In order to determine the oxygen-sensitive properties of SrTiO3thin films, various oxygen partial pressures P(O2) can be set up in the environment of the gas-sensitive elements by means of different gas mixtures or by using oxygen pumps realized in the form of stabilized zirconium oxide ZrO2. Two different measurement principles can be used to test the kinetic behavior of sputtered SrTiO3films with respect to rapid changes in the oxygen partial pressure under laboratory conditions. One way of achieving rapid changes in the oxygen partial pressure is to change the gas composition quickly at constant pressure in a sample chamber by using injection valves of the kind used in motor vehicles. However, an alternative approach is to perform kinetic experiments with a constant gas composition while the total pressure changes.